Gigaphoton Inc.
JP excimer-laser specialist since 2000 — DUV lithography light sources for semiconductor manufacturing.
About the company
Gigaphoton Inc. is a Japanese manufacturer of excimer lasers and EUV light sources for semiconductor lithography, founded 1 August 2000 as a joint venture and a wholly-owned subsidiary of Komatsu Ltd. since 2010. HQ in Oyama City (Tochigi Prefecture). 1,426 employees (as of 31 March 2026), capital 5 bn yen. President: Tatsuo Enami. Self-positioning: be the No. 1 lithography light-source provider. Main competitor to Cymer (ASML subsidiary). Excimer-laser line covers KrF (248 nm) and ArF (193 nm) DUV sources for semiconductor steppers/scanners as well as LPP-EUV light-source development.
Authorized distributors
No one publicly distributes this manufacturer yet.
Are you a distributor of this manufacturer? List yourself →
Industry story · Lifecycle
- 01.08.2000 Founding
Gigaphoton founded (2000)
Gigaphoton Inc. was founded on August 1, 2000 in Oyama (Tochigi) as a joint venture, later wholly-owned subsidiary of Komatsu Ltd. Specialized in excimer laser light sources for semiconductor lithography (KrF 248 nm + ArF 193 nm) and LPP-EUV sources.
Source