Quark Technology Co., Ltd.

VUV excimer lamp irradiation systems.

LUVEX-curated Active Mercury Lamp Manufacturer T2A3 Ibara Founded 2006
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About the company

Quark Technology is a Japanese manufacturer of UV light sources specializing in vacuum-UV (VUV) excimer lamp irradiation equipment for wavelengths of 126, 172, 193, 222 and 308 nm. Its product range covers high-intensity flat-type excimer irradiation systems, UV-LED irradiation units (including deep-UV LED) and UV measurement devices, used for UV cleaning, surface modification and curing.

APPLICATIONS
uv-cleaningsurface-modificationcuringsemiconductor-manufacturing
TECHNOLOGIES
excimerVUVUV-LED

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